JPH0387546U - - Google Patents

Info

Publication number
JPH0387546U
JPH0387546U JP14854789U JP14854789U JPH0387546U JP H0387546 U JPH0387546 U JP H0387546U JP 14854789 U JP14854789 U JP 14854789U JP 14854789 U JP14854789 U JP 14854789U JP H0387546 U JPH0387546 U JP H0387546U
Authority
JP
Japan
Prior art keywords
sealed container
vacuum
vacuum chamber
drive
drive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14854789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14854789U priority Critical patent/JPH0387546U/ja
Publication of JPH0387546U publication Critical patent/JPH0387546U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
JP14854789U 1989-12-21 1989-12-21 Pending JPH0387546U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14854789U JPH0387546U (en]) 1989-12-21 1989-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14854789U JPH0387546U (en]) 1989-12-21 1989-12-21

Publications (1)

Publication Number Publication Date
JPH0387546U true JPH0387546U (en]) 1991-09-05

Family

ID=31694992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14854789U Pending JPH0387546U (en]) 1989-12-21 1989-12-21

Country Status (1)

Country Link
JP (1) JPH0387546U (en])

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